Semiconductor
Precision machining of semiconductor equipment components encompasses key parts such as quartz rings, shower nozzles, and support tubes. These parts must withstand high temperatures and highly corrosive chemical environments while maintaining extremely high cleanliness and precision. Haolihui possesses complete CNC turning, milling, drilling, and grinding capabilities, enabling the processing of various metals and hard, brittle materials (such as quartz, ceramics, and silicon carbide). These processes are widely applied in wafer fabrication (quartz crucibles, quartz rods, quartz boats), photolithography (quartz masks), etching and deposition (quartz chambers, quartz tubes, quartz reactors), and cleaning and purification (quartz cleaning tanks), ensuring that products meet the stringent requirements of the semiconductor industry for stability, durability, and cleanliness.
Shower Head Series
In wafer cleaning, etching, and chemical mechanical polishing (CMP) processes, the shower head nozzles need to evenly spray the chemical solution or deionized water onto the wafer surface to maintain a stable flow rate and consistent distribution, avoid localized scouring or unevenness, and ensure surface flatness and yield.
Quartz Ring
Quartz rings are widely used in the etching and deposition chambers of semiconductors. They are installed at the edge of the wafer to avoid over-processing and make the plasma reaction more uniform. Quartz rings often contain multiple contours, chamfers and detailed grooves. If the processing control is not precise, it will directly affect the reaction uniformity and process results. Therefore, strict dimensional and surface quality standards must be met.
Support Tube
Support tubes are mostly used in semiconductor deposition cavities, mainly responsible for supporting and positioning wafers or quartz rings to ensure the stability of the process structure. Support tubes are prone to cracking and chipping during thin-walled or long cylindrical processing. Good dimensional control must be maintained during processing, and roundness, perpendicularity and concentricity must be kept highly accurate.
Wafer Carrier
The wafer boat is a key component in semiconductor manufacturing, used for holding and positioning wafers in high-temperature furnace tubes for heat treatment, oxidation, diffusion, and coating processes. It precisely arranges multiple wafers to ensure consistent spacing and maintain uniform airflow and temperature distribution, preventing uneven heating or contamination from affecting yield.
Tooth Fork
The key end-grip components in semiconductor automated handling equipment primarily function to provide reliable support during wafer transfer, pick-and-place, and loading, preventing slippage, misalignment, or edge scratches. During processing, the groove shape, thickness, and geometry of the toothed fork tip must maintain extremely high precision to ensure wafer positioning consistency and reduce process risks during high-speed automated handling.